GB/T 37959-2019
ActiveInformation model for containing process chamber IC equipment design
含工艺腔室类集成电路装备设计信息模型
Application Summary AI generated
This standard defines an information model for the design of integrated circuit (IC) equipment that contains process chambers, specifying the data structure and representation of design information. It is applied in the semiconductor manufacturing industry to facilitate the exchange and integration of design data between different engineering tools and systems used in the development of IC fabrication equipment. The standard supports design consistency and interoperability in the context of equipment design, simulation, and procurement.
Related Standards
GB/T 21078.2-2011
Banking—Personal identification number management and security—Part 2: Requirements for offline PIN handling in ATM and POS systems
GB/T 21079.1-2011
Banking -- Secure cryptographic devices (retail) -- Part 1: Concepts, requirements and evaluation methods
GA/T 947-2011
Portable video/audio recording equipment for the individual enforcing policeman
GA/T 737-2011
Basic data items of security service supervision
GB/T 27702-2011
Information and documentation--Information retrieval(Z39.50)--Application service definition and protocol specification
GB/T 18784.2-2005
Assurance method of CAD/CAM data quality
GB/T 18769-2003
Electronic transaction specification for bulk stock
GB/T 19688.1-2005
Information and documentation - Bibliographic data element directory - Part 1: Interloan applications
Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.