GB/T 37959-2019

Active

Information model for containing process chamber IC equipment design

含工艺腔室类集成电路装备设计信息模型

Standard Type
GBT
ICS
35.240.50
CCS
J07
Status
Active
Issue Date
2019-08-30
Implementation
2020-03-01
Centralized Committee
中国机械工业联合会
Issuing Authority
国家市场监督管理总局、中国国家标准化管理委员会

Application Summary AI generated

This standard defines an information model for the design of integrated circuit (IC) equipment that contains process chambers, specifying the data structure and representation of design information. It is applied in the semiconductor manufacturing industry to facilitate the exchange and integration of design data between different engineering tools and systems used in the development of IC fabrication equipment. The standard supports design consistency and interoperability in the context of equipment design, simulation, and procurement.

Related Standards

Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.